Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7923705 | Extreme ultra violet light source apparatus | Masato Moriya, Tamotsu Abe, Hiroshi Someya, Takayuki Yabu, Akira Sumitani +1 more | 2011-04-12 |
| 7903715 | Slab type laser apparatus | Krzysztof Nowak, Osamu Wakabayashi, Akira Endo | 2011-03-08 |
| 7880153 | Extreme ultra violet light source apparatus | Tamotsu Abe, Hiroshi Someya, Akira Sumitani | 2011-02-01 |