Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7928418 | Extreme ultra violet light source apparatus | Georg Soumagne, Yoshifumi Ueno, Hiroshi Komori, Katsunobu Nishihara, Young Gwang Kang +1 more | 2011-04-19 |
| 7923705 | Extreme ultra violet light source apparatus | Masato Moriya, Tamotsu Abe, Takashi Suganuma, Hiroshi Someya, Takayuki Yabu +1 more | 2011-04-12 |
| 7915600 | Extreme ultra violet light source apparatus | Yoshifumi Ueno, Georg Soumagne, Osamu Wakabayashi | 2011-03-29 |
| 7880153 | Extreme ultra violet light source apparatus | Takashi Suganuma, Tamotsu Abe, Hiroshi Someya | 2011-02-01 |