Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7968482 | Glass substrate | Shinkichi Miwa | 2011-06-28 |
| 7928418 | Extreme ultra violet light source apparatus | Georg Soumagne, Yoshifumi Ueno, Akira Sumitani, Katsunobu Nishihara, Young Gwang Kang +1 more | 2011-04-19 |