Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7928418 | Extreme ultra violet light source apparatus | Georg Soumagne, Yoshifumi Ueno, Hiroshi Komori, Akira Sumitani, Young Gwang Kang +1 more | 2011-04-19 |
| 7885387 | Extreme ultraviolet light and X-ray source target and manufacturing method thereof | Keiji Nagai, Qincui Gu, Takayoshi Norimatsu, Shinsuke Fujioka, Hiroaki Nishimura +2 more | 2011-02-08 |