Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8067756 | Extreme ultraviolet light source apparatus | Georg Soumagne, Shinji Nagai, Akira Endo, Tatsuya Yanagida | 2011-11-29 |
| 7928418 | Extreme ultra violet light source apparatus | Georg Soumagne, Hiroshi Komori, Akira Sumitani, Katsunobu Nishihara, Young Gwang Kang +1 more | 2011-04-19 |
| 7915600 | Extreme ultra violet light source apparatus | Georg Soumagne, Akira Sumitani, Osamu Wakabayashi | 2011-03-29 |