Issued Patents 2011
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8067756 | Extreme ultraviolet light source apparatus | Yoshifumi Ueno, Georg Soumagne, Akira Endo, Tatsuya Yanagida | 2011-11-29 |
| 8003963 | Extreme ultraviolet light source apparatus | Takanobu Ishihara, Kouji Kakizaki, Hiroshi Sobukawa, Takeshi Murakami, Masahiro Inoue | 2011-08-23 |
| 7999241 | Extreme ultraviolet light source apparatus | Takanobu Ishihara, Kouji Kakizaki, Tamotsu Abe | 2011-08-16 |
| 7989764 | Ion trap mass spectrometry method | Hiroyuki Yasuda, Tetsuya Nishida | 2011-08-02 |
| 7965756 | Optical element for gas laser and gas laser apparatus using the same | Osamu Wakabayashi, Kouji Kakizaki, Satoshi Tanaka | 2011-06-21 |
| 7903700 | Narrow-spectrum laser device | Osamu Wakabayashi, Koji Kakizaki, Takayuki Yabu, Takahito Kumazaki | 2011-03-08 |