Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8067732 | Electron beam apparatus | Mamoru Nakasuji, Takeshi Murakami, Tohru Satake, Tsutomi Karimata, Toshifumi Kimba +4 more | 2011-11-29 |
| 8003963 | Extreme ultraviolet light source apparatus | Shinji Nagai, Takanobu Ishihara, Kouji Kakizaki, Takeshi Murakami, Masahiro Inoue | 2011-08-23 |