Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8003963 | Extreme ultraviolet light source apparatus | Shinji Nagai, Kouji Kakizaki, Hiroshi Sobukawa, Takeshi Murakami, Masahiro Inoue | 2011-08-23 |
| 7999241 | Extreme ultraviolet light source apparatus | Shinji Nagai, Kouji Kakizaki, Tamotsu Abe | 2011-08-16 |