Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8003963 | Extreme ultraviolet light source apparatus | Shinji Nagai, Takanobu Ishihara, Hiroshi Sobukawa, Takeshi Murakami, Masahiro Inoue | 2011-08-23 |
| 7999241 | Extreme ultraviolet light source apparatus | Shinji Nagai, Takanobu Ishihara, Tamotsu Abe | 2011-08-16 |
| 8000361 | Laser system | Tamotsu Abe, Hideo Hoshino, Akira Endo, Osamu Wakabayashi | 2011-08-16 |
| 7965756 | Optical element for gas laser and gas laser apparatus using the same | Osamu Wakabayashi, Shinji Nagai, Satoshi Tanaka | 2011-06-21 |