Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8003962 | Extreme ultraviolet light source apparatus and nozzle protection device | Hiroshi Someya, Tamotsu Abe | 2011-08-23 |
| 8000361 | Laser system | Tamotsu Abe, Akira Endo, Osamu Wakabayashi, Kouji Kakizaki | 2011-08-16 |