Issued Patents 2011
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8057968 | Mask and method to pattern chromeless phase lithography contact hole | Soon Yoeng Tan, Qun Ying Lin, Huey Ming Chong, Liang-Choo Hsia | 2011-11-15 |
| 8048588 | Method and apparatus for removing radiation side lobes | Soon Yoeng Tan, Qunying Lin, Huey Ming Chong, Liang-Choo Hsia | 2011-11-01 |
| 8034543 | Angled-wedge chrome-face wall for intensity balance of alternating phase shift mask | Gek Soon Chua, Qunying Lin, Cho Jui Tay, Chenggen Quan | 2011-10-11 |
| 8003311 | Integrated circuit system employing multiple exposure dummy patterning technology | Soo Muay Goh, Qunying Lin, Martin Yeo | 2011-08-23 |
| 7926000 | Integrated circuit system employing dipole multiple exposure | Qunying Lin | 2011-04-12 |
| 7923180 | Cross technology reticles | Guoxiang Ning, Gek Soon Chua, Soon Yoeng Tan, Byoung Il Choi, Jason Phua | 2011-04-12 |
| 7866224 | Monitoring structure | Gek Soon Chua, Qun Ying Lin, Martin Yeo | 2011-01-11 |
| 7867698 | Reticle system for manufacturing integrated circuit systems | Gek Soon Chua, Byoung Il Choi, Ryan Khoon Khye Chong, Martin Yeo | 2011-01-11 |