Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8057968 | Mask and method to pattern chromeless phase lithography contact hole | Sia Kim Tan, Qun Ying Lin, Huey Ming Chong, Liang-Choo Hsia | 2011-11-15 |
| 8048588 | Method and apparatus for removing radiation side lobes | Sia Kim Tan, Qunying Lin, Huey Ming Chong, Liang-Choo Hsia | 2011-11-01 |
| 7923180 | Cross technology reticles | Sia Kim Tan, Guoxiang Ning, Gek Soon Chua, Byoung Il Choi, Jason Phua | 2011-04-12 |