Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8057968 | Mask and method to pattern chromeless phase lithography contact hole | Sia Kim Tan, Soon Yoeng Tan, Qun Ying Lin, Liang-Choo Hsia | 2011-11-15 |
| 8048588 | Method and apparatus for removing radiation side lobes | Sia Kim Tan, Soon Yoeng Tan, Qunying Lin, Liang-Choo Hsia | 2011-11-01 |