Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8057968 | Mask and method to pattern chromeless phase lithography contact hole | Sia Kim Tan, Soon Yoeng Tan, Huey Ming Chong, Liang-Choo Hsia | 2011-11-15 |
| 7866224 | Monitoring structure | Sia Kim Tan, Gek Soon Chua, Martin Yeo | 2011-01-11 |