Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8034543 | Angled-wedge chrome-face wall for intensity balance of alternating phase shift mask | Sia Kim Tan, Qunying Lin, Cho Jui Tay, Chenggen Quan | 2011-10-11 |
| 7923180 | Cross technology reticles | Sia Kim Tan, Guoxiang Ning, Soon Yoeng Tan, Byoung Il Choi, Jason Phua | 2011-04-12 |
| 7866224 | Monitoring structure | Sia Kim Tan, Qun Ying Lin, Martin Yeo | 2011-01-11 |
| 7867698 | Reticle system for manufacturing integrated circuit systems | Sia Kim Tan, Byoung Il Choi, Ryan Khoon Khye Chong, Martin Yeo | 2011-01-11 |