Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8034543 | Angled-wedge chrome-face wall for intensity balance of alternating phase shift mask | Gek Soon Chua, Sia Kim Tan, Qunying Lin, Cho Jui Tay | 2011-10-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8034543 | Angled-wedge chrome-face wall for intensity balance of alternating phase shift mask | Gek Soon Chua, Sia Kim Tan, Qunying Lin, Cho Jui Tay | 2011-10-11 |