Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8048588 | Method and apparatus for removing radiation side lobes | Sia Kim Tan, Soon Yoeng Tan, Huey Ming Chong, Liang-Choo Hsia | 2011-11-01 |
| 8034543 | Angled-wedge chrome-face wall for intensity balance of alternating phase shift mask | Gek Soon Chua, Sia Kim Tan, Cho Jui Tay, Chenggen Quan | 2011-10-11 |
| 8003311 | Integrated circuit system employing multiple exposure dummy patterning technology | Sia Kim Tan, Soo Muay Goh, Martin Yeo | 2011-08-23 |
| 7926000 | Integrated circuit system employing dipole multiple exposure | Sia Kim Tan | 2011-04-12 |