Issued Patents 2011
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8084757 | Contamination prevention in extreme ultraviolet lithography | Banqiu Wu | 2011-12-27 |
| 8017029 | Plasma mask etch method of controlling a reactor tunable element in accordance with the output of an array of optical sensors viewing the mask backside | Madhavi R. Chandrachood, Michael N. Grimbergen, Khiem K. Nguyen, Richard Lewington, Ibrahim M. Ibrahim +1 more | 2011-09-13 |
| 8012366 | Process for etching a transparent workpiece including backside endpoint detection steps | Richard Lewington, Michael N. Grimbergen, Khiem K. Nguyen, Darin Bivens, Madhavi R. Chandrachood | 2011-09-06 |
| 8002946 | Mask etch plasma reactor with cathode providing a uniform distribution of etch rate | Richard Lewington, Michael N. Grimbergen, Khiem K. Nguyen, Darin Bivens, Madhavi R. Chandrachood | 2011-08-23 |
| 8002899 | Method and apparatus for mask pellicle adhesive residue cleaning | Banqiu Wu, Richard Lee, M. Rao Yalamanchili, James S. Papanu, Chung Huan Jeon | 2011-08-23 |
| 7976671 | Mask etch plasma reactor with variable process gas distribution | Madhavi R. Chandrachood, Michael N. Grimbergen, Khiem K. Nguyen, Richard Lewington, Ibrahim M. Ibrahim +1 more | 2011-07-12 |
| 7967930 | Plasma reactor for processing a workpiece and having a tunable cathode | Richard Lewington, Michael N. Grimbergen, Khiem K. Nguyen, Darin Bivens, Madhavi R. Chandrachood | 2011-06-28 |
| 7955516 | Etching of nano-imprint templates using an etch reactor | Madhavi R. Chandrachood | 2011-06-07 |
| 7950010 | Software deployment system | Karl Goger, Ankur Bhatt, Raghunandan S, Rajeev Ranjan | 2011-05-24 |
| 7945218 | Method and system for tuning quality factor in high-Q, high-frequency filters | — | 2011-05-17 |
| 7943005 | Method and apparatus for photomask plasma etching | Madhavi R. Chandrachood, Richard Lewington, Darin Bivens, Amitabh Sabharwal, Sheeba J. Panayil +1 more | 2011-05-17 |
| 7924194 | Use of three phase clock in sigma delta modulator to mitigate the quantization noise folding | — | 2011-04-12 |
| 7909961 | Method and apparatus for photomask plasma etching | Madhavi R. Chandrachood, Richard Lewington, Darin Bivens, Amitabh Sabharwal, Sheeba J. Panayil +1 more | 2011-03-22 |
| RE42125 | Development bias connector with integral bearing support | Dhirendra C. Damji, Daniel A. Chiesa | 2011-02-08 |
| 7879510 | Method for quartz photomask plasma etching | Scott Anderson | 2011-02-01 |
| 7879371 | Caffeine fraction obtained from tea leaves and a method for inducing Agrobacterium tumefaciens-mediated genetic transformation in plants using said caffeine fraction | Indra Sandal, Amita Bhattacharya, Ravindranath Srigiripuram Desikalhar, Ashu Gulati, Paramvir Singh Ahuja | 2011-02-01 |