Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8017029 | Plasma mask etch method of controlling a reactor tunable element in accordance with the output of an array of optical sensors viewing the mask backside | Madhavi R. Chandrachood, Michael N. Grimbergen, Khiem K. Nguyen, Richard Lewington, Ibrahim M. Ibrahim +1 more | 2011-09-13 |
| 7976671 | Mask etch plasma reactor with variable process gas distribution | Madhavi R. Chandrachood, Michael N. Grimbergen, Khiem K. Nguyen, Richard Lewington, Ibrahim M. Ibrahim +1 more | 2011-07-12 |
| 7943005 | Method and apparatus for photomask plasma etching | Ajay Kumar, Madhavi R. Chandrachood, Richard Lewington, Darin Bivens, Amitabh Sabharwal +1 more | 2011-05-17 |
| 7909961 | Method and apparatus for photomask plasma etching | Ajay Kumar, Madhavi R. Chandrachood, Richard Lewington, Darin Bivens, Amitabh Sabharwal +1 more | 2011-03-22 |