Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7964818 | Method and apparatus for photomask etching | Elmira Ryabova, Richard Lewington, Madhavi R. Chandrachood, Darin Bivens | 2011-06-21 |
| 7943005 | Method and apparatus for photomask plasma etching | Ajay Kumar, Madhavi R. Chandrachood, Richard Lewington, Darin Bivens, Sheeba J. Panayil +1 more | 2011-05-17 |
| 7909961 | Method and apparatus for photomask plasma etching | Ajay Kumar, Madhavi R. Chandrachood, Richard Lewington, Darin Bivens, Sheeba J. Panayil +1 more | 2011-03-22 |