Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7964818 | Method and apparatus for photomask etching | Richard Lewington, Madhavi R. Chandrachood, Amitabh Sabharwal, Darin Bivens | 2011-06-21 |
| 7942965 | Method of fabricating plasma reactor parts | Jie Yuan, Jennifer Y. Sun | 2011-05-17 |
| 7919722 | Method for fabricating plasma reactor parts | Jennifer Y. Sun, Jie Yuan | 2011-04-05 |