Issued Patents 2011
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8080479 | Plasma process uniformity across a wafer by controlling a variable frequency coupled to a harmonic resonator | Kenneth S. Collins, Hiroji Hanawa, Kartik Ramaswamy, Douglas A. Buchberger, Jr., Shahid Rauf +10 more | 2011-12-20 |
| 8076247 | Plasma process uniformity across a wafer by controlling RF phase between opposing electrodes | Kenneth S. Collins, Hiroji Hanawa, Kartik Ramaswamy, Douglas A. Buchberger, Jr., Shahid Rauf +10 more | 2011-12-13 |
| 8067067 | Clean, dense yttrium oxide coating protecting semiconductor processing apparatus | Senh Thach, Jim Dempster, Li Xu | 2011-11-29 |
| 8034734 | Semiconductor processing apparatus which is formed from yttrium oxide and zirconium oxide to produce a solid solution ceramic apparatus | Ren-Guan Duan, Jie Yuan, Li Xu, Kenneth S. Collins | 2011-10-11 |
| 8016948 | Method of removing contaminants from a coating surface comprising an oxide or fluoride of a group IIIB metal | Xikun Wang, Li Xu | 2011-09-13 |
| 7968469 | Method of processing a workpiece in a plasma reactor with variable height ground return path to control plasma ion density uniformity | Kenneth S. Collins, Hiroji Hanawa, Kartik Ramaswamy, Douglas A. Buchberger, Jr., Shahid Rauf +10 more | 2011-06-28 |
| 7942965 | Method of fabricating plasma reactor parts | Elmira Ryabova, Jie Yuan | 2011-05-17 |
| 7925703 | Graphical interactive interface for immersive online communities | Mark Dinan, Ann Pickard, James Mason Bower | 2011-04-12 |
| 7919722 | Method for fabricating plasma reactor parts | Elmira Ryabova, Jie Yuan | 2011-04-05 |
| 7884025 | Plasma process uniformity across a wafer by apportioning ground return path impedances among plural VHF sources | Kenneth S. Collins, Hiroji Hanawa, Kartik Ramaswamy, Douglas A. Buchberger, Jr., Shahid Rauf +10 more | 2011-02-08 |
| 7879731 | Improving plasma process uniformity across a wafer by apportioning power among plural VHF sources | Kenneth S. Collins, Hiroji Hanawa, Kartik Ramaswamy, Douglas A. Buchberger, Jr., Shahid Rauf +10 more | 2011-02-01 |