Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8067067 | Clean, dense yttrium oxide coating protecting semiconductor processing apparatus | Jennifer Y. Sun, Jim Dempster, Li Xu | 2011-11-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8067067 | Clean, dense yttrium oxide coating protecting semiconductor processing apparatus | Jennifer Y. Sun, Jim Dempster, Li Xu | 2011-11-29 |