Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8067067 | Clean, dense yttrium oxide coating protecting semiconductor processing apparatus | Jennifer Y. Sun, Senh Thach, Jim Dempster | 2011-11-29 |
| 8034734 | Semiconductor processing apparatus which is formed from yttrium oxide and zirconium oxide to produce a solid solution ceramic apparatus | Jennifer Y. Sun, Ren-Guan Duan, Jie Yuan, Kenneth S. Collins | 2011-10-11 |
| 8016948 | Method of removing contaminants from a coating surface comprising an oxide or fluoride of a group IIIB metal | Xikun Wang, Jennifer Y. Sun | 2011-09-13 |
| 8008208 | Method of cleaning and forming a negatively charged passivation layer over a doped region | Michael P. Stewart, Lisong Zhou, Jen Shu | 2011-08-30 |