Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8084757 | Contamination prevention in extreme ultraviolet lithography | Ajay Kumar | 2011-12-27 |
| 8002899 | Method and apparatus for mask pellicle adhesive residue cleaning | Richard Lee, M. Rao Yalamanchili, Ajay Kumar, James S. Papanu, Chung Huan Jeon | 2011-08-23 |