Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8002899 | Method and apparatus for mask pellicle adhesive residue cleaning | Banqiu Wu, Richard Lee, M. Rao Yalamanchili, Ajay Kumar, Chung Huan Jeon | 2011-08-23 |
| 7914623 | Post-ion implant cleaning for silicon on insulator substrate preparation | Han-Wen Chen, Brian J. Brown, Steven Verhaverbeke | 2011-03-29 |