Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8002899 | Method and apparatus for mask pellicle adhesive residue cleaning | Banqiu Wu, Richard Lee, Ajay Kumar, James S. Papanu, Chung Huan Jeon | 2011-08-23 |
MY
M. Rao Yalamanchili
Overall (2011): #231,483 of 364,097Top 65%
1
Patents 2011