Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6960284 | Rotational and reciprocal radial movement of a sputtering magnetron | Jianming Fu, Peijun Ding | 2005-11-01 |
| 6919275 | Method of preventing diffusion of copper through a tantalum-comprising barrier layer | Tony P. Chiang, Gongda Yao, Peijun Ding, Fusen Chen, Barry Chin +2 more | 2005-07-19 |
| 6875321 | Auxiliary magnet array in conjunction with magnetron sputtering | Peijun Ding, Rong Tao | 2005-04-05 |