Issued Patents 2005
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6972253 | Method for forming dielectric barrier layer in damascene structure | Syun-Ming Jang | 2005-12-06 |
| 6955984 | Surface treatment of metal interconnect lines | Wen-Kai Wan, Yih-Hsiung Lin, Ming LEI, Baw-Ching Perng, Cheng-Chung Lin +1 more | 2005-10-18 |
| 6948238 | Method for dissociating metals from metal compounds | — | 2005-09-27 |
| 6943077 | Selective spacer layer deposition method for forming spacers with different widths | Baw-Ching Perng, Ming-Ta Lei, Yih-Shung Lin, Cheng-Chung Lin, Chia-Hui Lin | 2005-09-13 |
| 6895360 | Method to measure oxide thickness by FTIR to improve an in-line CMP endpoint determination | Syun-Ming Jang | 2005-05-17 |
| 6884149 | Method and system for in-situ monitoring of mixing ratio of high selectivity slurry | Shang-Ting Tsai, Ping Chuang, Henry Lo, Chao-Jung Chang, Ping-Hsu Chen +3 more | 2005-04-26 |