Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6884149 | Method and system for in-situ monitoring of mixing ratio of high selectivity slurry | Shang-Ting Tsai, Ping Chuang, Chao-Jung Chang, Ping-Hsu Chen, Yu-Liang Lin +3 more | 2005-04-26 |
| 6875285 | System and method for dampening high pressure impact on porous materials | Ching-Ya Wang, Ping Chuang, Yu-Liang Lin, Mei Sheng Zhou | 2005-04-05 |
| 6875709 | Application of a supercritical CO2 system for curing low k dielectric materials | Chun-Hsien Lin, Anthony Liu, Yu-Liang Lin | 2005-04-05 |
| 6872127 | Polishing pad conditioning disks for chemical mechanical polisher | Yu-Liang Lin, Ping Chuang | 2005-03-29 |