Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6969688 | Wet etchant composition and method for etching HfO2 and ZrO2 | Fang Chen, Hun-Jan Tao, Peng-Fu Hsu, Yue-Ho Hsieh, Chih-Cheng Wang +1 more | 2005-11-29 |
| 6955984 | Surface treatment of metal interconnect lines | Wen-Kai Wan, Yih-Hsiung Lin, Ming LEI, Cheng-Chung Lin, Chia-Hui Lin +1 more | 2005-10-18 |
| 6943077 | Selective spacer layer deposition method for forming spacers with different widths | Ai-Sen Liu, Ming-Ta Lei, Yih-Shung Lin, Cheng-Chung Lin, Chia-Hui Lin | 2005-09-13 |
| 6838381 | Methods for improving sheet resistance of silicide layer after removal of etch stop layer | Peng-Fu Hsu, Ming-Huan Tsai, Ju-Wang Hsu, Yaun-Hung Chiu | 2005-01-04 |