Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6969688 | Wet etchant composition and method for etching HfO2 and ZrO2 | Baw-Ching Perng, Fang Chen, Hun-Jan Tao, Yue-Ho Hsieh, Chih-Cheng Wang +1 more | 2005-11-29 |
| 6864193 | Aqueous cleaning composition containing copper-specific corrosion inhibitor | Chun-Li Chou, Hun-Jan Tao | 2005-03-08 |
| 6838381 | Methods for improving sheet resistance of silicide layer after removal of etch stop layer | Ming-Huan Tsai, Baw-Ching Perng, Ju-Wang Hsu, Yaun-Hung Chiu | 2005-01-04 |