Issued Patents 2005
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6951624 | Method and apparatus of arrayed sensors for metrological control | Yehiel Gotkis, Rodney Kistler, David Hemker, Nicolas Bright | 2005-10-04 |
| 6937915 | Apparatus and methods for detecting transitions of wafer surface properties in chemical mechanical polishing for process status and control | Rodney Kistler, David Hemker, Yehiel Gotkis, Bruno Morel, Damon Vincent Williams | 2005-08-30 |
| 6929531 | System and method for metal residue detection and mapping within a multi-step sequence | Yehiel Gotkis, David Hemker, Nicolas Bright, Rodney Kistler | 2005-08-16 |
| 6925348 | Methods for detecting transitions of wafer surface properties in chemical mechanical polishing for process status and control | Rodney Kistler, David Hemker, Yehiel Gotkis, Bruno Morel, Damon Vincent Williams | 2005-08-02 |
| 6922053 | Complementary sensors metrological process and method and apparatus for implementing the same | Yehiel Gotkis, Rodney Kistler, David Hemker, Nicolas Bright | 2005-07-26 |
| 6902466 | Oscillating chemical mechanical planarization apparatus | Miguel Saldana | 2005-06-07 |
| 6896596 | Polishing pad ironing system | Yehiel Gotkis, Rodney Kistler | 2005-05-24 |
| 6894491 | Method and apparatus for metrological process control implementing complementary sensors | Yehiel Gotkis, Rodney Kistler, David Hemker, Nicolas Bright | 2005-05-17 |