Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6909935 | Methods with resolution enhancement feature for improving accuracy of conversion of required chemical mechanical polishing pressure to force to be applied by polishing head to wafer | — | 2005-06-21 |
| 6902466 | Oscillating chemical mechanical planarization apparatus | Aleksander Owczarz | 2005-06-07 |
| 6843707 | Methods for aligning a surface of an active retainer ring with a wafer surface for chemical mechanical polishing | Damon Vincent Williams | 2005-01-18 |