Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6976903 | Apparatus for controlling retaining ring and wafer head tilt for chemical mechanical polishing | — | 2005-12-20 |
| 6937915 | Apparatus and methods for detecting transitions of wafer surface properties in chemical mechanical polishing for process status and control | Rodney Kistler, David Hemker, Yehiel Gotkis, Aleksander Owczarz, Bruno Morel | 2005-08-30 |
| 6925348 | Methods for detecting transitions of wafer surface properties in chemical mechanical polishing for process status and control | Rodney Kistler, David Hemker, Yehiel Gotkis, Aleksander Owczarz, Bruno Morel | 2005-08-02 |
| 6843707 | Methods for aligning a surface of an active retainer ring with a wafer surface for chemical mechanical polishing | Miguel Saldana | 2005-01-18 |