Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6937915 | Apparatus and methods for detecting transitions of wafer surface properties in chemical mechanical polishing for process status and control | Rodney Kistler, David Hemker, Yehiel Gotkis, Aleksander Owczarz, Damon Vincent Williams | 2005-08-30 |
| 6925348 | Methods for detecting transitions of wafer surface properties in chemical mechanical polishing for process status and control | Rodney Kistler, David Hemker, Yehiel Gotkis, Aleksander Owczarz, Damon Vincent Williams | 2005-08-02 |