Issued Patents 2005
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6951624 | Method and apparatus of arrayed sensors for metrological control | Yehiel Gotkis, Rodney Kistler, Aleksander Owczarz, David Hemker | 2005-10-04 |
| 6929531 | System and method for metal residue detection and mapping within a multi-step sequence | Yehiel Gotkis, Aleksander Owczarz, David Hemker, Rodney Kistler | 2005-08-16 |
| 6922053 | Complementary sensors metrological process and method and apparatus for implementing the same | Yehiel Gotkis, Rodney Kistler, Aleksander Owczarz, David Hemker | 2005-07-26 |
| 6909190 | Dual-damascene dielectric structures | Jay E. Uglow, Dave Hemker, Kenneth P. MacWilliams, Jeffrey C. Benzing, Timothy M. Archer | 2005-06-21 |
| 6894491 | Method and apparatus for metrological process control implementing complementary sensors | Yehiel Gotkis, Rodney Kistler, Aleksander Owczarz, David Hemker | 2005-05-17 |
| 6859765 | Method and apparatus for slope to threshold conversion for process state monitoring and endpoint detection | Yehiel Gotkis, Vladimir Katz, David Hemker, Rodney Kistler | 2005-02-22 |