Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6876455 | Method and apparatus for broadband optical end point determination for in-situ film thickness measurement | Bella Mitchell | 2005-04-05 |
| 6859765 | Method and apparatus for slope to threshold conversion for process state monitoring and endpoint detection | Yehiel Gotkis, David Hemker, Rodney Kistler, Nicolas Bright | 2005-02-22 |