Issued Patents 2005
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6977228 | Semiconductor device using damascene technique and manufacturing method therefor | Yusuke Kohyama, Nobuo Hayasaka | 2005-12-20 |
| 6966821 | Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device | Riichirou Aoki, Hiromi Yajima, Seiji Ishikawa, Manabu Tsujimura | 2005-11-22 |
| 6960540 | Film formation method, semiconductor element and method thereof, and method of manufacturing a disk-shaped storage medium | Shinichi Ito | 2005-11-01 |
| 6946387 | Semiconductor device and method for manufacturing the same | Junichi Wada, Atsuko Sakata, Tomio Katata, Takamasa Usui, Masahiko Hasunuma +3 more | 2005-09-20 |
| 6941008 | Pattern forming method | Atsushi Ando, Kazuyoshi Sugihara, Tetsuro Nakasugi | 2005-09-06 |
| 6935932 | Polishing apparatus and method | Norio Kimura, Mitsuhiko Shirakashi, You Ishii, Junji Kunisawa, Hiroyuki Yano | 2005-08-30 |
| 6933216 | Fine particle film forming apparatus and method and semiconductor device and manufacturing method for the same | Atsuko Sakata, Keiichi Sasaki, Nobuo Hayasaka, Hirotaka Nishino | 2005-08-23 |
| 6933205 | Integrated circuit device and method of manufacturing the same | Mie Matsuo, Nobuo Hayasaka, Noriaki Matsunaga | 2005-08-23 |
| 6933234 | Method for manufacturing semiconductor device and polishing apparatus | Kenro Nakamura, Naoto Miyashita, Takashi Yoda | 2005-08-23 |
| 6924236 | Manufacturing method of semiconductor device | Hiroyuki Yano | 2005-08-02 |
| 6913681 | Plating method and plating apparatus | Tetsuo Matsuda, Hisashi Kaneko | 2005-07-05 |
| 6913513 | Polishing apparatus | Norio Kimura, Hiroyuki Yano | 2005-07-05 |
| 6911398 | Method of sequentially processing a plurality of lots each including semiconductor substrates | Masaki Narita, Tokuhisa Ohiwa | 2005-06-28 |
| 6875986 | Ion generation method and filament for ion generation apparatus | Atsushi Murakoshi, Kyoichi Suguro | 2005-04-05 |
| 6870174 | Electron beam tube and window for electron beam extraction | Masanori Yamaguchi | 2005-03-22 |
| 6846750 | High precision pattern forming method of manufacturing a semiconductor device | Tokuhisa Ohiwa, Shoji Seta, Nobuo Hayasaka, Akihiro Kojima, Junko Ohuchi +3 more | 2005-01-25 |