Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6966821 | Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device | Katsuya Okumura, Riichirou Aoki, Hiromi Yajima, Manabu Tsujimura | 2005-11-22 |
| RE38878 | Polishing apparatus | Masayoshi Hirose, Manabu Tsujimura, Norio Kimura, You Ishii | 2005-11-15 |
| 6929856 | Dicing tape | Koji Hayashi, Kenji Sonoyama | 2005-08-16 |