Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6941008 | Pattern forming method | Atsushi Ando, Kazuyoshi Sugihara, Katsuya Okumura | 2005-09-06 |
| 6914252 | Charged beam exposure apparatus having blanking aperture and basic figure aperture | — | 2005-07-05 |
| 6897454 | Energy beam exposure method and exposure apparatus | Noriaki Sasaki | 2005-05-24 |