Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6911398 | Method of sequentially processing a plurality of lots each including semiconductor substrates | Katsuya Okumura, Tokuhisa Ohiwa | 2005-06-28 |
| 6887802 | Method of manufacturing semiconductor device and semiconductor device | Koichi Sato, Tokuhisa Ohiwa | 2005-05-03 |