Issued Patents 2005
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6977228 | Semiconductor device using damascene technique and manufacturing method therefor | Yusuke Kohyama, Katsuya Okumura | 2005-12-20 |
| 6946387 | Semiconductor device and method for manufacturing the same | Junichi Wada, Atsuko Sakata, Tomio Katata, Takamasa Usui, Masahiko Hasunuma +3 more | 2005-09-20 |
| 6933205 | Integrated circuit device and method of manufacturing the same | Mie Matsuo, Noriaki Matsunaga, Katsuya Okumura | 2005-08-23 |
| 6933216 | Fine particle film forming apparatus and method and semiconductor device and manufacturing method for the same | Atsuko Sakata, Keiichi Sasaki, Katsuya Okumura, Hirotaka Nishino | 2005-08-23 |
| 6846750 | High precision pattern forming method of manufacturing a semiconductor device | Tokuhisa Ohiwa, Shoji Seta, Katsuya Okumura, Akihiro Kojima, Junko Ohuchi +3 more | 2005-01-25 |