Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6933216 | Fine particle film forming apparatus and method and semiconductor device and manufacturing method for the same | Atsuko Sakata, Keiichi Sasaki, Nobuo Hayasaka, Katsuya Okumura | 2005-08-23 |