Issued Patents 2005
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6978673 | Methods and systems for simultaneously fabricating multi-frequency MEMS devices | Burgess R. Johnson, William P. Platt, David K. Arch, Mark W. Weber | 2005-12-27 |
| 6969425 | Methods for reducing the curvature in boron-doped silicon micromachined structures | Cleopatra Cabuz, Francis M. Erdmann, Robert D. Horning | 2005-11-29 |
| 6946200 | Methods for reducing the curvature in boron-doped silicon micromachined structures | Cleopatra Cabuz, Francis M. Erdmann, Robert D. Horning | 2005-09-20 |
| 6927098 | Methods and apparatus for attaching MEMS devices to housing | Jon DCamp, Harlan L. Curtis, Lori Dunaway | 2005-08-09 |
| 6914323 | Methods and apparatus for attaching getters to MEMS device housings | Harlan L. Curtis, Jon DCamp, Lori Dunaway | 2005-07-05 |
| 6865944 | Methods and systems for decelerating proof mass movements within MEMS structures | Mark W. Weber, William P. Platt | 2005-03-15 |