Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6969425 | Methods for reducing the curvature in boron-doped silicon micromachined structures | Cleopatra Cabuz, Max C. Glenn, Robert D. Horning | 2005-11-29 |
| 6946200 | Methods for reducing the curvature in boron-doped silicon micromachined structures | Cleopatra Cabuz, Max C. Glenn, Robert D. Horning | 2005-09-20 |