Issued Patents 2005
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6969425 | Methods for reducing the curvature in boron-doped silicon micromachined structures | Cleopatra Cabuz, Max C. Glenn, Francis M. Erdmann | 2005-11-29 |
| 6946200 | Methods for reducing the curvature in boron-doped silicon micromachined structures | Cleopatra Cabuz, Max C. Glenn, Francis M. Erdmann | 2005-09-20 |
| 6924165 | Methods and systems for buried electrical feedthroughs in a glass-silicon MEMS process | Jeffrey A. Ridley | 2005-08-02 |
| 6912902 | Bending beam accelerometer with differential capacitive pickoff | David Malametz, Stephen F. Becka | 2005-07-05 |
| 6888233 | Systems for buried electrical feedthroughs in a glass-silicon MEMS process | Jeffrey A. Ridley | 2005-05-03 |
| 6858541 | Etch stop control for MEMS device formation | — | 2005-02-22 |