Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6924165 | Methods and systems for buried electrical feedthroughs in a glass-silicon MEMS process | Robert D. Horning | 2005-08-02 |
| 6888233 | Systems for buried electrical feedthroughs in a glass-silicon MEMS process | Robert D. Horning | 2005-05-03 |