Issued Patents 2005
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6968862 | Electrostatically actuated valve | Eugen Cabuz | 2005-11-29 |
| 6969425 | Methods for reducing the curvature in boron-doped silicon micromachined structures | Max C. Glenn, Francis M. Erdmann, Robert D. Horning | 2005-11-29 |
| 6946200 | Methods for reducing the curvature in boron-doped silicon micromachined structures | Max C. Glenn, Francis M. Erdmann, Robert D. Horning | 2005-09-20 |
| 6889567 | 3D array integrated cells for the sampling and detection of air bound chemical and biological species | — | 2005-05-10 |
| 6837476 | Electrostatically actuated valve | Eugen Cabuz | 2005-01-04 |