Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6978673 | Methods and systems for simultaneously fabricating multi-frequency MEMS devices | Burgess R. Johnson, Max C. Glenn, William P. Platt, Mark W. Weber | 2005-12-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6978673 | Methods and systems for simultaneously fabricating multi-frequency MEMS devices | Burgess R. Johnson, Max C. Glenn, William P. Platt, Mark W. Weber | 2005-12-27 |